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AlN granule

ALN granule is made by spray granulation of ALN powder, containing binder and sintering aids, which can be directly pressed and formed.ALN granule of Juci Technology has good fluidity, high sintering activity, high purity and high strength, is used to make various semiconductor equipment parts such as aluminum nitride heater/electrostatic sucker/etching protective cover/hot pressed aluminum nitride ceramics.

Product characteristics

High Purity

Ready for press

High strength

High sintering activity

High fluidity

技術(shù)參數(shù)

項(xiàng)目Item		GS-80
平均粒徑 Mean particle size (μm)		70~120
Y2O3 (WT%)		5
松裝密度 Bulk density (g/cm3)		0.8~1.0
流動性 Fluidity (s/50g)		80~100
雜質(zhì)含量 Impurity	Ca (ppm)	＜500
	Si (ppm)	<100
	Fe (ppm)	<30